JGH 600A-1800B /Roots dry vacuum pump for harsh process pumps (H-type)
445
Three series of dry vacuum pump products are developed for the thin film deposition, etching, and ion implantation processes of integrated circuits (accounting for about 70% of the main process).
Product Details
Application Field
Technical Data
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INTEGRATED CIRCUIT, PHOTOVOLTAIC, FLAT PANEL DISPLAY, INDUSTRY, RESEARCH
